MEMS(Microelectromechanical Systems) Technology and Application
MEMS (MicroElectroMechanical Systems) is a physically micro systems which have both electronical and mechanical components. With so tiny body, the MEMS devices can work in many special place which normal mechanical devices can not do, such as in human vein, or can become a role part of small system, such as microphone or earphone of micro mobile telephone. Since it is too small to be made with normal mechanical method, MEMS mainly use integrated circuit fabrication techniques and materials to make it. In our research project, we designed and fabricated a micro pneumatic valve with dimension smaller than one millimeter. Its flow rate can reach to 5 litre/min with 10 psi air pressure and its actuation time is shorter than one millisecond.
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Please direct any questions to:Imin Kao
Date revised - 11/12/98 (mb)